A novel nonlinear robust controller is proposed in view of uncertain nonlinear factors that commonly exist in achieving the micro/nano motion of piezoelectric ceramics. The controller can achieve robustness by controlling non-singular terminal sliding mode, and achieve real-time compensation and model-free control of unknown terms by delay estimation technology, which is beneficial to achieving the estimation of the full status by robust exact differentiator in engineering applications. The closed-loop stability of the system is proved by Lyapunov criterion. The results of the semi-physical simulation experiment show that the proposed controller can control piezoelectric ceramics to achieve sub-micron precision motion control. Theoretical analysis and practice prove that the proposed control strategy can achieve model-free, energy-saving, highly precise and robust-controlling effects. It has strong engineering application and can be effectively applied to micro/nano operations driven by piezoelectric ceramics.