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Laser Journal, Volume. 29, Issue 2, 66(2008)

Study on vibration characteristic of cantilever in MEMS

[in Chinese]1... [in Chinese]2, [in Chinese]2, [in Chinese]1, [in Chinese]1, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on vibration characteristic of cantilever in MEMS[J]. Laser Journal, 2008, 29(2): 66

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    Received: Dec. 22, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology