Integration is the trend of multi-channel filter in imaging spectrum system,which is called mirco filters.Adjusting the center layer of F-P filter is an effective method to fabricate multi-channel filters.Because of limitation of usual optical coating technology,so the yield of integrating all channel in single substrate is very low.A new method is developed to solve this problem,which combines multi-time ion mask etching with tradition coating technique.As an example,an 8-channel micro integrated filter is fabricated,and optical channel position control accuracy is below 1%.