Acta Optica Sinica, Volume. 27, Issue 5, 776(2007)
Wavelength Multiplexing of Optical Fiber Microelectromechanical System Fabry-Pérot Pressure Sensors
In order to realize the quasi-distributed measurement for Fabry-Pérot (F-P) sensors, a multiplexing scheme of optical fiber microelectromechanical system (MEMS) Fabry-Pérot pressure sensors with arrayed waveguide grating is presented. Based on Fabry-Pérot interferometry, the sensors are fabricated with microelectromechanical system techniques and interrogated with the dual-wavelength method. In this method, the single-valued relation between ratio of sensor reflectance at two different wavelengths and the calibrated pressure are used to determine the pressure. The arrayed waveguide grating (AWG) is used to multiplex the sensors. The demodulation and multiplexing principles are theoretically analyzed and experimentally verified. The experimental results demonstrate that in the linear measurement range of pressure (0~1.5 MPa), the sensitivity (ratio of sensor reflectivity/pressure) of the system achieves 0.02026 MPa-1, the measured ratio has a good linearity with the pressure, and the standard deviation of the reflectance ratio is less than 3×10-4. The system can eliminate errors resulted from wavelength-independent variations in the fiber interconnection to the sensor,and has reasonable linearity, sensitivity and precision. Many sensors can be multiplexed in this system and there is no observable crosstalk among them.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Wavelength Multiplexing of Optical Fiber Microelectromechanical System Fabry-Pérot Pressure Sensors[J]. Acta Optica Sinica, 2007, 27(5): 776