International Journal of Extreme Manufacturing, Volume. 2, Issue 4, 42001(2020)

Emerging miniaturized energy storage devices for microsystem applications: from design to integration

Huaizhi Liu... Guanhua Zhang, Xin Zheng, Fengjun Chen and Huigao Dua* |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, People’s Republic of China
  • show less

    The rapid progress of micro/nanoelectronic systems and miniaturized portable devices has tremendously increased the urgent demands for miniaturized and integrated power supplies. Miniaturized energy storage devices (MESDs), with their excellent properties and additional intelligent functions, are considered to be the preferable energy supplies for uninterrupted powering of microsystems. In this review, we aim to provide a comprehensive overview of the background, fundamentals, device configurations, manufacturing processes, and typical applications of MESDs, including their recent advances. Particular attention is paid to advanced device configurations, such as two-dimensional (2D) stacked, 2D planar interdigital, 2D arbitrary-shaped, three-dimensional planar, and wire-shaped structures, and their corresponding manufacturing strategies, such as printing, scribing, and masking techniques. Additionally, recent developments in MESDs, including microbatteries and microsupercapacitors, as well as microhybrid metal ion capacitors, are systematically summarized. A series of on-chip microsystems, created by integrating functional MESDs, are also highlighted. Finally, the remaining challenges and future research scope on MESDs are discussed.

    Tools

    Get Citation

    Copy Citation Text

    Huaizhi Liu, Guanhua Zhang, Xin Zheng, Fengjun Chen, Huigao Dua. Emerging miniaturized energy storage devices for microsystem applications: from design to integration[J]. International Journal of Extreme Manufacturing, 2020, 2(4): 42001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Topical Review

    Received: Jul. 4, 2020

    Accepted: --

    Published Online: Apr. 16, 2021

    The Author Email: Dua Huigao (duanhg@hnu.edu.cn)

    DOI:10.1088/2631-7990/abba12

    Topics