Acta Optica Sinica, Volume. 35, Issue 12, 1212002(2015)
Measurement of 2 m SiC Asphere Mirror Based on Swing Arm Profilometer
For the measurement of large SiC mirror before interferometry test, the method of swing arm profilometry (SAP) is introduced. The basic principle and flow chart of SAP are presented; with surface reconstructed based on consistency of surface height at scan crossings and defocusing amount of mirror surface measured with a laser tracker as supplementary, an optimized test model is built. As an example, a 2040 mm SiC mirror is tested by SAP, with accuracy of 0.46 μm root mean square (RMS), which is 0.04 μm deviation from interferometric test. As a best-fitting sphere being basement of the test, in situ metrology is implemented; this method provides an accurate and efficient way to measure a large mirror, and meet the need of high-accuracy measurement of large SiC mirrors during grinding.
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Xiong Ling, Luo Xiao, Liu Zhenyu, Zheng Ligong, Zhang Feng, Zhang Xuejun. Measurement of 2 m SiC Asphere Mirror Based on Swing Arm Profilometer[J]. Acta Optica Sinica, 2015, 35(12): 1212002
Category: Instrumentation, Measurement and Metrology
Received: May. 22, 2015
Accepted: --
Published Online: Dec. 10, 2015
The Author Email: Ling Xiong (xyznpp@126.com)