Acta Optica Sinica, Volume. 35, Issue 12, 1212002(2015)

Measurement of 2 m SiC Asphere Mirror Based on Swing Arm Profilometer

Xiong Ling1,2、*, Luo Xiao1, Liu Zhenyu1, Zheng Ligong1, Zhang Feng1, and Zhang Xuejun1
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  • 1[in Chinese]
  • 2[in Chinese]
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    For the measurement of large SiC mirror before interferometry test, the method of swing arm profilometry (SAP) is introduced. The basic principle and flow chart of SAP are presented; with surface reconstructed based on consistency of surface height at scan crossings and defocusing amount of mirror surface measured with a laser tracker as supplementary, an optimized test model is built. As an example, a 2040 mm SiC mirror is tested by SAP, with accuracy of 0.46 μm root mean square (RMS), which is 0.04 μm deviation from interferometric test. As a best-fitting sphere being basement of the test, in situ metrology is implemented; this method provides an accurate and efficient way to measure a large mirror, and meet the need of high-accuracy measurement of large SiC mirrors during grinding.

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    Xiong Ling, Luo Xiao, Liu Zhenyu, Zheng Ligong, Zhang Feng, Zhang Xuejun. Measurement of 2 m SiC Asphere Mirror Based on Swing Arm Profilometer[J]. Acta Optica Sinica, 2015, 35(12): 1212002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 22, 2015

    Accepted: --

    Published Online: Dec. 10, 2015

    The Author Email: Ling Xiong (xyznpp@126.com)

    DOI:10.3788/aos201535.1212002

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