Chinese Journal of Lasers, Volume. 32, Issue 4, 514(2005)
A Study of Dynamic Confocal Laser Probe based on Time Difference Measurement
Based on a study optical dynamic active confocal probe, a new method of the measuring deviation focus is developed. The key point of this new method is that displacement of the turning fork is converted to time difference measurement, thus the optical and mechanical structures of the laser probe system can be simplified greatly, and its accuracy and stability are enhanced. A new high integration measurement system is designed, and systematic experiments resulted of the including linearity, measuring range and performance were carried out.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Study of Dynamic Confocal Laser Probe based on Time Difference Measurement[J]. Chinese Journal of Lasers, 2005, 32(4): 514