Chinese Journal of Lasers, Volume. 32, Issue 4, 514(2005)

A Study of Dynamic Confocal Laser Probe based on Time Difference Measurement

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less

    Based on a study optical dynamic active confocal probe, a new method of the measuring deviation focus is developed. The key point of this new method is that displacement of the turning fork is converted to time difference measurement, thus the optical and mechanical structures of the laser probe system can be simplified greatly, and its accuracy and stability are enhanced. A new high integration measurement system is designed, and systematic experiments resulted of the including linearity, measuring range and performance were carried out.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Study of Dynamic Confocal Laser Probe based on Time Difference Measurement[J]. Chinese Journal of Lasers, 2005, 32(4): 514

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: measurement and metrology

    Received: Dec. 23, 2003

    Accepted: --

    Published Online: Jun. 1, 2006

    The Author Email: (fanyuming@tju.edu.cn)

    DOI:

    Topics