Acta Optica Sinica, Volume. 37, Issue 3, 305001(2017)
Compensational Method for Aberration in Mosaic System of Holographic Grating
The reference interference fringe is used to detect the parameters of the holographic grating. The distortion of the interference fringes is caused by the system aberration, and the grating tiling-error is generated. In order to compensate the grating tiling-error, the relationship between the aberration and the distortion of interference fringe is studied. The reference interference fringes are simulated by computer, and the grating tiling-error is per-modulated into the interference fringe image. To verify the effectiveness of the proposed method, the grating splicing experiment is carried out under the condition of system aberration whose peak to peak value is 0.72λ. The maximum variation of the -1st diffraction wave front at the grating seam is 0.36λ. When the prefabricated reference interference fringe images are used as the reference, and the maximum variation is 0.097λ. The experimental results show that the modulated interference fringes can effectively control the tiling-error of the grating in the exposure system with large aberration.
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Qian Guolin, Wu Jianhong, Li Chaoming, Chen Xinrong. Compensational Method for Aberration in Mosaic System of Holographic Grating[J]. Acta Optica Sinica, 2017, 37(3): 305001
Category: Diffraction and Gratings
Received: Sep. 9, 2016
Accepted: --
Published Online: Mar. 8, 2017
The Author Email: Guolin Qian (qgl_jy@jssvc.edu.cn)