A novel variety of three dimensional (3D) vibration sensor based on chirped fiber Bragg grating (CFBG) is developed to measure 3D vibration in the mechanical equipment field. The sensor is composed of three independent vibration sensing units. Each unit uses double matched chirped gratings as sensing elements, and the sensing signal is processed by the edge filtering demodulation method. The structure and principle of the sensor are theoretically analyzed, and its performances are obtained from some experiments and the results are as follows: operating frequency range of the sensor is 10 Hz ? 500 Hz; acceleration measurement range is 2 m·s^-2 ? 30 m·s^-2; sensitivity is about 70 mV/m·s^-2; crosstalk coefficient is greater than 22 dB; self-compensation for temperature is available. Eventually the sensor is applied to monitor the vibration state of radiation pump. Seen from its experiments and applications, the sensor has good sensing performances, which can meet a certain requirement for some engineering measurement.