Infrared and Laser Engineering, Volume. 30, Issue 1, 66(2001)
Study on the formation mechanism of PtSi film by X-ray diffraction and X-ray photo spectrum
It is very important forformation of PtSi thin film to make the phases of thin film change into Pt
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the formation mechanism of PtSi film by X-ray diffraction and X-ray photo spectrum[J]. Infrared and Laser Engineering, 2001, 30(1): 66
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