Optics and Precision Engineering, Volume. 17, Issue 7, 1548(2009)
Two-dimensional actuation of liquid using surface acoustic wave
This paper reports the two-dimensional actuation of a water drop by using a Surface Acoustic Wave(SAW).Four Interdigital Transducers (IDTs) is fabricated on a 127.8° rotated Y-cut X-propagation LiNbO3 substrate.Each IDT is composed of 10 strip electrode pairs,which is 400 μm in pitch,100 μm in electrode strip width and 12 mm in aperture.The overall size of the device is 26 mm×26 mm×0.45 mm.Due to the anisotropy of LiNbO3 crystal,the resonance frequencies of IDTs are in 9.3 MHz along Y axis and 9.6 MHz along X axis,respectively.Being superior in characteristics to alunimium,copper is used as the electrode material in fabrication process and the Lift-off process is adopted to fabricate electrodes,so that optimum process parameters are finally obtained.An ultra-long-time ultrasonic assistance is used to get rid of residues completely,finally,a two-dimensional actuation of the water drop is observed,which shows the input power is 9 W and the average speed is drop movement is 5 mm/s.The propagation of SAW in LiNbO3 substrate is simulated with ANSYS,simulation result agrees well with the calculation of theoretical vibration amplitude in LiNbO3.This research demonstrates that the two-dimensional acuation of a liquid drop by using the SAW is feasible.This prototype of liquid actuation is promising in lab-on-chip and μ-TAS applications.
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GAO Yang, LI Yi-gui, ZHANG Jun-feng. Two-dimensional actuation of liquid using surface acoustic wave[J]. Optics and Precision Engineering, 2009, 17(7): 1548
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Received: Jan. 20, 2009
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Yang GAO (heartsme@sjtu.edu.cn)
CSTR:32186.14.