Optics and Precision Engineering, Volume. 32, Issue 11, 1713(2024)

Design and simulation of stator for multi legged miniature linear ultrasonic motor

Dazhi WANG1,2,3, Mingluo YANG1、*, Fengshu WANG1, Zefei LI1, Yu DUAN1, Shiwen LIANG3, Lingjie KONG3, Yiru CAI1, Xinlong YANG1, Zetian ZHANG1, and Bin TANG4
Author Affiliations
  • 1School of Mechanical Engineering, Dalian University of Technology, Dalian6024, China
  • 2State Key Laboratory of High Performance Precision Manufacturing, Dalian11604, China
  • 3Ningbo Institute of Danlian University of Technology, Ningbo15000, China
  • 4Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang621900, China
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    To meet the application requirements of narrow spaces, low voltage, and high driving force, a multi-legged linear miniature ultrasonic motor based on a single bending vibration mode was proposed. Firstly, the stator structure was designed according to the driving principle of the ultrasonic motor. Using the finite element software ANSYS Workbench, a dynamic simulation model of the stator was established, followed by structural optimization and dynamic analysis. The final dimensions of the stator were determined to be 8 mm×1 mm×0.6 mm, with measured resonant frequency errors of 6.99% and 5.46%, respectively. Finally, a nonlinear simulation contact model between the stator and mover of the motor was created to verify the feasibility of the bidirectional drive of the ultrasonic motor. A driving performance test device for the micro linear ultrasonic motor was constructed. The measured results indicated that with a driving voltage of 60 Vpp, the maximum no-load speed was 53.3 mm/s, the maximum load was 43.3 mN, and the thrust-to-weight ratio was 280. Experimental results demonstrate that the micro ultrasonic motor has a viable principle, a simple and compact structure, and good output performance, suggesting broad application prospects in precision drive fields such as optical systems, precision positioning systems, and mobile terminals.

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    Dazhi WANG, Mingluo YANG, Fengshu WANG, Zefei LI, Yu DUAN, Shiwen LIANG, Lingjie KONG, Yiru CAI, Xinlong YANG, Zetian ZHANG, Bin TANG. Design and simulation of stator for multi legged miniature linear ultrasonic motor[J]. Optics and Precision Engineering, 2024, 32(11): 1713

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    Paper Information

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    Received: Feb. 5, 2024

    Accepted: --

    Published Online: Aug. 8, 2024

    The Author Email: YANG Mingluo (mingluoyang@126.com)

    DOI:10.37188/OPE.20243211.1713

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