INFRARED, Volume. 43, Issue 12, 15(2022)
Research of Surface Defects from p-on-n HgCdTe Double-Layer Heterojunction Materials
The surface defects of HgCdTe p-on-n double-layer heterojunction materials are studied. The surface defects of materials will affect the performance of subsequent devices. Through observing the surface of the epitaxial material with the optical microscope, it is found that the surface irregular blocky defects and surface hole defects are common. By using confocal microscope, scanning electron microscope, energy spectrum analysis and other testing methods, it is found that the defects originate from the depletion of cadmium in the growth process of p-type layer and the extension of defects in the growth process of n-type layer.
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HAO Fei, HU Yi-lin, XING Xiao-shuai, YANG Hai-yan, LI Qian, SHE Wei-lim. Research of Surface Defects from p-on-n HgCdTe Double-Layer Heterojunction Materials[J]. INFRARED, 2022, 43(12): 15
Received: Sep. 20, 2022
Accepted: --
Published Online: Mar. 11, 2023
The Author Email: Fei HAO (haofei20008@163.com)