Acta Optica Sinica, Volume. 39, Issue 1, 0126012(2019)
Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses
Femtosecond laser micromachining has been widely used in laser material processing because of its unique advantages of low thermal effects, high precision and three-dimensional processing capability inside materials. The recent advances of the application of femtosecond laser microfabrication combined with femtosecond laser pulse shaping to micro-nanofabrication in transparent materials are reviewed. These techniques possess an important application prospect in novel integrated optics and micro- and nano-optics.
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Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng. Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses[J]. Acta Optica Sinica, 2019, 39(1): 0126012
Category: Physical Optics
Received: Aug. 30, 2018
Accepted: Oct. 16, 2018
Published Online: May. 10, 2019
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