Chinese Optics Letters, Volume. 2, Issue 7, 07426(2004)

Fabrication and characterization of two-dimensional pin-cushion position sensitive detectors

Dongyan Chen*, Bin Lin, and Yuqing Chen
Author Affiliations
  • State Key Laboratory of Modern Optical Instrumentation, CNERC for Optical Instruments, Zhejiang University, Hangzhou 310027
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    In this paper, the fabrication and testing results of a two-dimensional pin-cushion position sensitive detector (PSD) are presented. The obtained pin-cushion PSD with an 8 * 8 mm2 effective area presents a maximum spectral response of 0.5 mA/mW at 850-nm wavelength, a 12-nA dark current at 5-V reverse voltage, a reverse breakdown voltage of 50 V, a nonlinearity of 2.175%, and a spatial resolution of 10 um. The spatial resolution is relatively low and the slight pin-cushion concave distortion is generated due to the incompletely satisfied relationship between sheet resistivity of the anode and the resistance per unit length.

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    Dongyan Chen, Bin Lin, Yuqing Chen. Fabrication and characterization of two-dimensional pin-cushion position sensitive detectors[J]. Chinese Optics Letters, 2004, 2(7): 07426

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    Paper Information

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    Received: Jan. 13, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

    The Author Email: Dongyan Chen (patown@163.com)

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