Acta Optica Sinica, Volume. 30, Issue 5, 1349(2010)

Fourier Transform Profilometry for Surface with Specular Reflection

Chen Lijuan* and Xu Lihua
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  • [in Chinese]
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    Because of the specular reflection of the object,there must be many hight-light areas in the image. The intensity of the specular reflection is relatively strong,so phase information of structured optical field is inevitably covered up by specular reflection. If the reflected light field of the surface with specular reflection by general Fourier transform profilometry is directly measured,wrong 3D surface data must occur. According to polarization properties of the light field,using light-filtering function of optical components,and combining Fourier transform profilometry with Phong illumination model,3D surface of the object with specular reflection can be correctly measured. Both theoretical analysis and experimental results not only prove that specular reflection will affect the modulation field of the surface,but also prove that the proposed measurement method can measure the surface with specular reflection. So application fields of Fourier transform profilometry could be greatly expanded.

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    Chen Lijuan, Xu Lihua. Fourier Transform Profilometry for Surface with Specular Reflection[J]. Acta Optica Sinica, 2010, 30(5): 1349

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 1, 2009

    Accepted: --

    Published Online: May. 11, 2010

    The Author Email: Lijuan Chen (maomao500240@126.com)

    DOI:10.3788/aos20103005.1349

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