Chinese Optics Letters, Volume. 11, Issue 9, 091202(2013)
Fast and accurate measurement of large optical surfaces before polishing using a laser tracker
We present a method that accurately measures large optical surfaces before polishing using a laser tracker. Using the scanning mode of the laser tracker considerably improves measurement efficiency and minimizes the dominant errors caused by environmental change. We use this method to measure a \Phi 1.3-m aspheric mirror and obtain a measurement uncertainty of 0.72 \mu m (root mean square, RMS).
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Jie Li, Shibin Wu. Fast and accurate measurement of large optical surfaces before polishing using a laser tracker[J]. Chinese Optics Letters, 2013, 11(9): 091202
Category: Instrumentation, measurement, and metrology
Received: Apr. 7, 2013
Accepted: Jun. 28, 2013
Published Online: Aug. 27, 2013
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