Acta Optica Sinica, Volume. 37, Issue 10, 1012002(2017)
Position Registration Method of Simultaneous Phase-Shifting Interferograms Based on SURF and RANSAC Algorithms
Simultaneous phase-shifting interferometry obtains multiple phase-shifting interferograms simultaneously to realize phase-shifting interferometry of the dynamic wavefront. In order to ensure the measurement accuracy, it is necessary to perform accurate position registration of the phase-shifting interferograms before implementation of the phase shifting algorithm. A position registration method based on the speed up robust features (SURF) algorithm and the random sample consensus (RANSAC) algorithm is proposed. Through the registration of background image with certain characteristics, the transform relation between corresponding images is obtained, which is used for the phase-shifting interferogram to realize position registration of the simultaneous phase-shifting interferograms. The simulation results show that the method is effective on the translation and rotation transforms in the case of non-uniform light intensity. The method can also obtain transform matrix by registration to achieve phase recovery under the white Gaussian noise. The method is applied to measure the standard plane with a four-step simultaneous phase-shifting micro-interferometer, and the peak-to-valley value and root mean square value are 23.2520 nm and 2.3149 nm, respectively.
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Jin Jingjing, Lu Wenlong, Guo Xiaoting, Liu Xiaojun. Position Registration Method of Simultaneous Phase-Shifting Interferograms Based on SURF and RANSAC Algorithms[J]. Acta Optica Sinica, 2017, 37(10): 1012002
Category: Instrumentation, Measurement and Metrology
Received: Mar. 17, 2017
Accepted: --
Published Online: Oct. 9, 2017
The Author Email: Jingjing Jin (M201570516@hust.edu.cn)