The transmission anode micro X-ray tube is a key component of energy dispersive X-ray Fluorescence Analysis (EDXRFA) as exciting source. So in EDXRFA we hope to get the primary X-ray spectrum which is simply distributed. In the present paper, the authors used the Monte Carlo (MC) method to study the spectrum character of the transmission anode micro X-ray tube with different thickness of target. We cut the spectrum into high energy (5keV~50keV) part and low energy (<5 keV) part and compared them to each other. The result showed that the flux of high energy part is big and the flux of low energy part is small when the electron energy is 50 keV and the target is 4 μｍ thick Ag. This is better for EDXRFA.