Laser Plasma Soft X-Ray Source with Cryogenic Target

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 18, Issue 6, 675(1998)

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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Abstract Get PDF(in Chinese)

A new type of laser plasma soft X-ray source with solid CO2 target is reported. The laser plasma source is of low debris characteristics and very suitable for soft X-ray projection lighography in the future.

Keywords

cryogenic target soft X-ray source laser plasma

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Laser Plasma Soft X-Ray Source with Cryogenic Target[J]. Acta Optica Sinica, 1998, 18(6): 675

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Paper Information

Category: Lasers and Laser Optics

Received: Jun. 1, 1997

Accepted: --

Published Online: Oct. 18, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology