Acta Optica Sinica, Volume. 40, Issue 23, 2315001(2020)

Error Analysis and Compensation of Galvanometer Laser Scanning Measurement System

Teng Wang, Shuming Yang*, Shusheng Li, Ye Yuan, Pengyu Hu, Tao Liu, and Shuhai Jia
Author Affiliations
  • State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
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    Galvanometer scanning systems are widely used in various fields such as laser rapid prototyping, laser precision marking, and laser scanning measurement for their high speed and precision. However, system measurement errors are induced because of the introduction of a galvanometer system. In view of this, firstly, a linear laser one-dimensional galvanometer scanning system is built and calibrated by the double-checkerboard calibration method. Then, the error model of the system is established and the measurement error in the scanning process is theoretically analyzed. Finally, a compensation method based on the table look-up method is proposed for the galvanometer rotation error. The experimental results show that when the measuring working distance is about 250 mm, after the error compensation, the square root error of center distance decreases from 0.733 mm to 0.061 mm and the standard deviation from 0.200 mm to 0.060 mm. It follows that this method can significantly improve the measurement accuracy and robustness of the system.

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    Teng Wang, Shuming Yang, Shusheng Li, Ye Yuan, Pengyu Hu, Tao Liu, Shuhai Jia. Error Analysis and Compensation of Galvanometer Laser Scanning Measurement System[J]. Acta Optica Sinica, 2020, 40(23): 2315001

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    Paper Information

    Category: Machine Vision

    Received: Jul. 13, 2020

    Accepted: Aug. 7, 2020

    Published Online: Dec. 1, 2020

    The Author Email: Yang Shuming (shuming.yang@mail.xjtu.eud.cn)

    DOI:10.3788/AOS202040.2315001

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