Acta Optica Sinica, Volume. 19, Issue 7, 1006(1999)
Light Scattering Measurement of Surface Roughness by Variable Wave Vectors
Based on the linear relationship between the logarithm of the central peak energy and k2⊥ in light scattering, a method for the measurement of surface roughness by changing the wave vectors is proposed. Experimental measurements of 6 samples of silicon backsides were conducted
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[in Chinese], [in Chinese], [in Chinese]. Light Scattering Measurement of Surface Roughness by Variable Wave Vectors[J]. Acta Optica Sinica, 1999, 19(7): 1006
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