Acta Photonica Sinica, Volume. 31, Issue 3, 293(2002)
GROWTH KINETIC OF SiGe/Si PHOTOCHEMICAL VAPOR DEPOSITION
Keywords
Tools
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. GROWTH KINETIC OF SiGe/Si PHOTOCHEMICAL VAPOR DEPOSITION[J]. Acta Photonica Sinica, 2002, 31(3): 293
Paper Information
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20