Laser & Optoelectronics Progress, Volume. 57, Issue 15, 152401(2020)
Study on Measurement of Optical Parameters of Anisotropic Crystal by Single Wavelength Ellipsometry
The optical parameters of anisotropic crystal, with optical axis parallel to surface is measured by employing a single-wavelength reflective ellipsometer and method of rotating the sample many times. The principle of measuring the optical parameters of anisotropic crystal by single-wavelength ellipsometer is analyzed, the simulated annealing simplex joint inversion algorithm is improved, the influence of the light incident angle, sample optical axis direction, rotation angle, and positioning error on the measurement results are numerically simulated and analyzed. Experimental results show that the measurement accuracy of the main refractive index, absorption coefficient, and optical axis azimuth angle of the crystal are 0.0001-0.0003, 0.000001-0.000400, 0.02°-0.40°, respectively, which indicates the method has high self-consistency and accuracy.
Get Citation
Copy Citation Text
Juan Wang, Lina Ji, Yun Bai, Zuohua Huang. Study on Measurement of Optical Parameters of Anisotropic Crystal by Single Wavelength Ellipsometry[J]. Laser & Optoelectronics Progress, 2020, 57(15): 152401
Category: Optics at Surfaces
Received: Oct. 23, 2019
Accepted: Nov. 26, 2019
Published Online: Aug. 4, 2020
The Author Email: Huang Zuohua (zuohuah@scnu.edu.cn)