Laser & Optoelectronics Progress, Volume. 57, Issue 15, 152401(2020)

Study on Measurement of Optical Parameters of Anisotropic Crystal by Single Wavelength Ellipsometry

Juan Wang, Lina Ji, Yun Bai, and Zuohua Huang*
Author Affiliations
  • School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou, Guangdong 510006, China
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    The optical parameters of anisotropic crystal, with optical axis parallel to surface is measured by employing a single-wavelength reflective ellipsometer and method of rotating the sample many times. The principle of measuring the optical parameters of anisotropic crystal by single-wavelength ellipsometer is analyzed, the simulated annealing simplex joint inversion algorithm is improved, the influence of the light incident angle, sample optical axis direction, rotation angle, and positioning error on the measurement results are numerically simulated and analyzed. Experimental results show that the measurement accuracy of the main refractive index, absorption coefficient, and optical axis azimuth angle of the crystal are 0.0001-0.0003, 0.000001-0.000400, 0.02°-0.40°, respectively, which indicates the method has high self-consistency and accuracy.

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    Juan Wang, Lina Ji, Yun Bai, Zuohua Huang. Study on Measurement of Optical Parameters of Anisotropic Crystal by Single Wavelength Ellipsometry[J]. Laser & Optoelectronics Progress, 2020, 57(15): 152401

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    Paper Information

    Category: Optics at Surfaces

    Received: Oct. 23, 2019

    Accepted: Nov. 26, 2019

    Published Online: Aug. 4, 2020

    The Author Email: Huang Zuohua (zuohuah@scnu.edu.cn)

    DOI:10.3788/LOP57.152401

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