Semiconductor Optoelectronics, Volume. 43, Issue 3, 510(2022)
Performance and Mechanism Analysis of Thin Absorption Region AlGaN Schottky Solarblind Detector with Different Metal Contact
For a Schottky detector with a thin absorption region of 100~200nm, the influence of different metal contacts on the dark current and spectral response characteristics was studied. Taking GaNbased materials as the main body, Au and Ni/Au were prepared on the surface of thin Al0.42Ga0.58N to form Schottky contacts, and Ti/Al/Ti/Au were prepared on the surface of Al0.55Ga0.45N to form ohmic contacts. Thus, an AlGaN Schottky solarblind detector with a thin absorption region is fabricated. The results show that for AlGaN material, the photoresponse of Au Schottky detector is good, reaching 0.10A/W, the peak external quantum efficiency is 47%, but the dark current is slightly larger, which is 3.91×10-10A/cm2. The dark current of Ni/Au Schottky detector is stable at 4.17×10-11A/cm2, while the responsivity is generally 0.07A/W, and the external quantum efficiency is 33%. The test results are consistent with the simulation model. For the front irradiation mode, Au Schottky detector has a larger response range and higher responsivity than Ni/Au Schottky detector due to factors such as barrier height and interface loss layer. For the back irradiation mode, the thickness of the absorption layer has a great effect on the response range, and the thin absorption region effectively extends the response range.
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HU Lefeng, ZHANG Yan. Performance and Mechanism Analysis of Thin Absorption Region AlGaN Schottky Solarblind Detector with Different Metal Contact[J]. Semiconductor Optoelectronics, 2022, 43(3): 510
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Received: Jan. 24, 2022
Accepted: --
Published Online: Aug. 1, 2022
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