Laser & Optoelectronics Progress, Volume. 52, Issue 5, 51202(2015)

Research on Randomly Phase Shifting Surface Measurement Based on Least-Squares Iteration

Li Dong*, Jiang Hongzhen, Liu Yong, and Liu Xu
Author Affiliations
  • [in Chinese]
  • show less

    In phase shifting interferometry, surface measurement error will exist due to the phase shifting error resulted from the system or environment. The principle of the least-squares iterative algorithm with randomly phase shifting is introduced. The original surface can be reconstructed with high accuracy by iteration in the numerical simulation. The phenomenon that the reconstructed surface may be inversed to the actual one because of the randomly phase shifting is analyzed. It is proposed that the phase shifting orientation should be known in this algorithm to achieve correct results. Experiments are carried out for verification. The calibration method of the phase shifting direction of the interferometer is indicated.

    Tools

    Get Citation

    Copy Citation Text

    Li Dong, Jiang Hongzhen, Liu Yong, Liu Xu. Research on Randomly Phase Shifting Surface Measurement Based on Least-Squares Iteration[J]. Laser & Optoelectronics Progress, 2015, 52(5): 51202

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 14, 2014

    Accepted: --

    Published Online: Apr. 2, 2015

    The Author Email: Dong Li (zjulid@126.com)

    DOI:10.3788/lop52.051202

    Topics