Optics and Precision Engineering, Volume. 17, Issue 4, 771(2009)

Experiment of grinding SiC mirror with fixed abrasive

WANG Xu1...2,*, ZHANG Xue-jun1, XU Ling-di1,2, PEI Shu33 and LIU Jian-zhuo3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    A new technique called fixed abrasive surfacing technique is presented for manufacturing SiC reflecting mirrors,and a mirror with good quality is obtained by grinding with bigger diamond abrasives at a high speed and the fixed motion between abrasives and workpieces.The material removal characteristics on the SiC are measured at certain rotation speed and pressure by W7,W5,W3.5,W1.5 pellets,and the removal characteristic curves obtained by above experiments show that this method can offer a higher removal rate and stability for the mirror manufacturing.In addition,a surface roughness experiment is undertaken,and the results indicate that a surface roughness of 42.758 nm rms can be obtained by W7 pellets.The experiment also indicates that the surface roughness is decrease with changing pellets in a smaller diamond diameter.At the end of the experiment,a smooth surface in a roughness of 1.591 nm rms is gotten after using W1.5 pellets.These results conmonstrate that the proposed technique for manufacturing SiC reflecting mirrors with fixed abrasives is able to replace the traditional manufacturing technology with slurry abrasives completely in certain finishing phases.

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    WANG Xu, ZHANG Xue-jun, XU Ling-di, PEI Shu3, LIU Jian-zhuo. Experiment of grinding SiC mirror with fixed abrasive[J]. Optics and Precision Engineering, 2009, 17(4): 771

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    Paper Information

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    Received: Apr. 10, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: WANG Xu (wangxu-308@163.com)

    DOI:

    CSTR:32186.14.

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