Nano-Micro Letters, Volume. 15, Issue 1, 223(2023)

Green Vertical-Cavity Surface-Emitting Lasers Based on InGaN Quantum Dots and Short Cavity

Tao Yang1... Yan-Hui Chen1, Ya-Chao Wang1, Wei Ou1, Lei-Ying Ying1, Yang Mei1,*, Ai-Qin Tian2, Jian-Ping Liu2,**, Hao-Chung Guo3,4 and Bao-Ping Zhang1,*** |Show fewer author(s)
Author Affiliations
  • 1Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen, 361005 Fujian, People’s Republic of China
  • 2Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123 Jiangsu, People’s Republic of China
  • 3Department of Photonics, National Yang Ming Chiao Tung University, Hsinchu, 30010 Taiwan, People’s Republic of China
  • 4Semiconductor Research Center, Honhai Research Institute, New Taipei, 220236 Taiwan, People’s Republic of China
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    Room temperature low threshold lasing of green GaN-based vertical cavity surface emitting laser (VCSEL) was demonstrated under continuous wave (CW) operation. By using self-formed InGaN quantum dots (QDs) as the active region, the VCSEL emitting at 524.0 nm has a threshold current density of 51.97 A cm-2, the lowest ever reported. The QD epitaxial wafer featured with a high IQE of 69.94% and the δ-function-like density of states plays an important role in achieving low threshold current. Besides, a short cavity of the device (~ 4.0 λ) is vital to enhance the spontaneous emission coupling factor to 0.094, increase the gain coefficient factor, and decrease the optical loss. To improve heat dissipation, AlN layer was used as the current confinement layer and electroplated copper plate was used to replace metal bonding. The results provide important guidance to achieving high performance GaN-based VCSELs.

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    Tao Yang, Yan-Hui Chen, Ya-Chao Wang, Wei Ou, Lei-Ying Ying, Yang Mei, Ai-Qin Tian, Jian-Ping Liu, Hao-Chung Guo, Bao-Ping Zhang. Green Vertical-Cavity Surface-Emitting Lasers Based on InGaN Quantum Dots and Short Cavity[J]. Nano-Micro Letters, 2023, 15(1): 223

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    Paper Information

    Category: Research Articles

    Received: May. 2, 2023

    Accepted: Aug. 17, 2023

    Published Online: Dec. 15, 2023

    The Author Email: Mei Yang (meiyang@xmu.edu.cn), Liu Jian-Ping (jpliu2010@sinano.ac.cn), Zhang Bao-Ping (bzhang@xmu.edu.cn)

    DOI:10.1007/s40820-023-01189-0

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