Acta Photonica Sinica, Volume. 34, Issue 10, 1542(2005)
Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer
A Mirau microscopic interferometric system for measuring three-dimensional motions of microelectromechanical systems (MEMS) with nanometer resolution is demonstrated.The system utilizes a commercial Mirau microscopic interferometer,which mounts directly on a light microscope.The system was used for full three dimensional motion measurement of a surface micromachined lateral resonator.In-plane motions were determined from stop-action bright field images taken at the best plane of focus.Out-of-plane motions were determined from stroboscopic interferograms obtained at eight different positions of the objective nanopositioner.Experimental results demonstrate nanometer resolution for both in-plane and out-of plane motions.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer[J]. Acta Photonica Sinica, 2005, 34(10): 1542