Photonic Sensors, Volume. 12, Issue 2, 140(2022)

Effect of PMMA Removal Methods on Opto-Mechanical Behaviors of Optical Fiber Resonant Sensor With Graphene Diaphragm

Yujian LIU1, Cheng LI1,2、*, Shangchun FAN1, and Xuefeng SONG3
Author Affiliations
  • 1School of Instrumentation Science and Opto-Electronics Engineering, Beihang University, Beijing 100191, China
  • 2Research Institute of Beihang University in Shenzhen, Shenzhen 518057, China
  • 3Shenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
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    Regarding the dependence of the treatment of removing polymethyl methacrylate (PMMA) from graphene upon the prestress in the film, two typical PMMA removal methods including acetone-vaporing and high-temperature annealing were investigated based on the opto-mechanical behaviors of the developed optical fiber Fabry-Perot (F-P) resonant sensor with a 125-μm diameter and ~10-layer-thickness graphene diaphragm. The measured resonant responses showed that the F-P sensor via annealing process exhibited the resonant frequency of 481 kHz and quality factor of 1 034 at ~2 Pa and room temperature, which are respectively 2.5 times and 33 times larger than the acetone-treated sensor. Moreover, the former achieved a high sensitivity of 110.4 kHz/kPa in the tested range of 2 Pa–2.5 kPa, apparently superior to the sensitivity of 16.2 kHz/kPa obtained in the latter. However, the time drift of resonant frequency also mostly tended to occur in the annealed sensor, thereby shedding light on the opto-mechanical characteristics of graphene-based F-P resonant sensors, along with an optimized optical excitation and detection scheme.

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    Yujian LIU, Cheng LI, Shangchun FAN, Xuefeng SONG. Effect of PMMA Removal Methods on Opto-Mechanical Behaviors of Optical Fiber Resonant Sensor With Graphene Diaphragm[J]. Photonic Sensors, 2022, 12(2): 140

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    Paper Information

    Category: Regular

    Received: Feb. 23, 2021

    Accepted: May. 18, 2021

    Published Online: Jan. 10, 2022

    The Author Email: LI Cheng (licheng@buaa.edu.cn)

    DOI:10.1007/s13320-021-0636-3

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