Chinese Journal of Lasers, Volume. 30, Issue 2, 171(2003)
Method for Testing Small Light Spot Produced by an Optical System with High NA
This paper introduced a method to testing small light spot produced by an optical system with high NA. By using technology of fiber probe detecting and PZT tube scanning of near field optical microscopy, the small light spot can be measured with high spatial resolution. The results show that a resolution of 50~100 nm can be obtained.
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[in Chinese], [in Chinese]. Method for Testing Small Light Spot Produced by an Optical System with High NA[J]. Chinese Journal of Lasers, 2003, 30(2): 171