Electro-Optic Technology Application, Volume. 29, Issue 3, 71(2014)
Research on Three-dimensional Surface Reconstruction Method of White Light Interferometry
Twyman optical circuit structure and LED light source are used in white light three-dimensional interferometry. The reconstruction algorithms of interference images and component surface are simulated. Using Matlab software, two kinds of surface structure functions are chosen to simulate the reconstructed surface and choose five reference points to compare. Research results show that white interferometry has high accuracy, short measurement time and relative error is less than 0.5%.
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YANG Bao-lei, LI Dan, ZHU Nan-nan, CAO Zeng-hui, SUN Teng-fei, ZHENG Tian-tian, ZHANG Jun. Research on Three-dimensional Surface Reconstruction Method of White Light Interferometry[J]. Electro-Optic Technology Application, 2014, 29(3): 71
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Received: Jan. 3, 2014
Accepted: --
Published Online: Jul. 18, 2014
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CSTR:32186.14.