Acta Optica Sinica, Volume. 40, Issue 4, 0405001(2020)
Effect of Microstructure Height Error on Diffraction Efficiency at Oblique Incidence in a Certain Temperature Range
The change in environmental temperature can reduce the diffraction efficiency of diffractive optical elements (DOEs) and thus affect the imaging quality of a hybrid optical system. Based on the expression of diffraction efficiency at oblique incidence, the temperature change is considered in the design of the double-layer diffractive optical elements (DLDOEs). The mathematical model of microstructure height error and diffraction efficiency/polychromatic integral diffraction efficiency (PIDE) of the DLDOEs within a certain temperature range and at certain incident angles is developed. The DLDOE that works in a visible waveband is taken as an example. The result shows that when a range of environmental temperature is determined, the optimal relative microstructure height error corresponding to the maximum PIDE decreases with the increase of the incident angle range. For the DLDOEs working within the incident angle range of 0°--15° and the environmental temperature range of 40--80 ℃, the maximum PIDE is 96.81%, and the corresponding optimal relative microstructure height error is 4.42%. Accordingly, the proposed model can further improve the design theory of the manufacturing error of the DLDOEs.
Get Citation
Copy Citation Text
Liangliang Yang, Chenglin Liu, Yongbing Zhao, Renjia Guo. Effect of Microstructure Height Error on Diffraction Efficiency at Oblique Incidence in a Certain Temperature Range[J]. Acta Optica Sinica, 2020, 40(4): 0405001
Category: Diffraction and Gratings
Received: Sep. 16, 2019
Accepted: Nov. 6, 2019
Published Online: Feb. 11, 2020
The Author Email: Yang Liangliang (yang_liangliang@163.com)