Laser & Optoelectronics Progress, Volume. 50, Issue 10, 101702(2013)
Research on the Technology of Parallel Laser Confocal Microscopy Detection Based on Digital Micromirror Device
In order to measure workpiece′s micro-nano three-dimensional topography, a parallel confocal microscopy detection system based on digital micromirror device(DMD) is set up. Firstly, the Fraunhofer diffraction model of DMD is studied. Secondly, the parallel scanning model of 2×2 pixel unit and T=3 is realized by the use of DMD. Then the three-dimensional image reconstruction algorithm and laser speckle homogenization is analyzed. Finally, the measuring system makes three-dimensional measurements for coated plate, WSZ position sensitive anode detector and screw respectively. The experimental results show that the three-dimensional reconstruction image is obtained under the condition that the stepping motor moves 10 nm per step. This parallel confocal microscopy system greatly improves the three-dimensional testing speed and can satisfactorily meet the general industrial testing requirement. It provides a new method of research and application for parallel confocal detection technology.
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Tu Long, Yu Jin, Fan Zhongwei, Qiu Jisi, Zhao Tianzhuo, Wang Zhihao, Wu Quan, Ge Wenqi, Guo Guangyan, Wang Haocheng. Research on the Technology of Parallel Laser Confocal Microscopy Detection Based on Digital Micromirror Device[J]. Laser & Optoelectronics Progress, 2013, 50(10): 101702
Category: Medical Optics and Biotechnology
Received: Mar. 27, 2013
Accepted: --
Published Online: Aug. 27, 2013
The Author Email: Long Tu (tulong@aoe.ac.cn)