Laser & Optoelectronics Progress, Volume. 56, Issue 17, 170625(2019)
A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS
In this paper, a high-fineness optical fiber Fabry-Perot (F-P) pressure sensor based on micro-electro-mechanical system (MEMS) is proposed and experimentally demonstrated. The sensor is a high-fineness F-P interferometer formed by a silicon diaphragm and a Pyrex#7740 glass sheet both coated with high-reflection film. The change of pressure causes the length change of F-P cavity. Thus, based on the high-sensitive optical fiber white light interferometry, the pressure can be obtained by measuring the cavity length of the F-P. Experimental results show that the pressure sensor has properties of good measurement resolution, high linearity and low temperature drift characteristics.
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Taojie Zhang, Yi Jiang, Weiyi Ma. A High Fineness Optical Fiber F-P Pressure Sensor Based on MEMS[J]. Laser & Optoelectronics Progress, 2019, 56(17): 170625
Category: Fiber Optics and Optical Communications
Received: Mar. 22, 2019
Accepted: Apr. 25, 2019
Published Online: Sep. 5, 2019
The Author Email: Zhang Taojie (zhangtaojie958@foxmail.com), Jiang Yi (bitjy@bit.deu.cn)