Acta Optica Sinica, Volume. 32, Issue 3, 318001(2012)
New Method of Spatial Differential Imaging with Confocal Microscope
A new method for obtaining the spatial differential confocal microscopic image is presented. In order to realize spatial differential confocal microscopy, an optical complementary chopper is designed based on time-resolved technology to achieve the differential of signals. Combining with confocal scanning technology, using the different signals of confocal microscope the spatial differential confocal microscopic image is obtained. Through experiments, the rationality of the system is approved. The spatial differential confocal microscopic images of integrated circuit maskplate are measured on this system. The results show that the spatial differential confocal microscopy can gain edge profile of imaging objects and enhance image edge compared to the confocal microscopy.
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Zhang Man, Tang Zhilie, Tan Zhiliang, Wu Yongbo, Liao Yanfei, Guo Lina. New Method of Spatial Differential Imaging with Confocal Microscope[J]. Acta Optica Sinica, 2012, 32(3): 318001
Category: Microscopy
Received: Sep. 13, 2011
Accepted: --
Published Online: Jan. 17, 2012
The Author Email: Man Zhang (zm46233@163.com)