The main research is to realize the fabrication of Fabry-Pérot(FP) optical microcavity array based on CO₂ laser processing. Firstly, by combining CO₂ laser micromachining and mask, an array-type concave structure was prepared on the glass substrate, and the characteristics of the structure were analyzed. Measurement and simulation analysis results show that the concave structure can be approximated to a Gaussian surface with depth ranging from 0.042 μm to 0.64 μm and full width at half maximum height ranging from 11.30 μm to 16.60 μm, the bottom of the structure can be approximated as a spherical surface. Secondly, FP microcavity array was prepared by dielectric coating and microcavity assembly, using a flat mirror-concave mirror microcavity assembly form to form an FP stable cavity. Finally, the generation of optofluidic laser in the FP microcavity array was realized.