Laser & Optoelectronics Progress, Volume. 57, Issue 15, 151202(2020)

Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization

Haijiao Yu1 and Guogang Zhao2、*
Author Affiliations
  • 1College of Electrical and Information, Jilin University of Architecture and Technology, Changchun, Jilin 130114, China
  • 2College of Computer Science and Engineering, Jilin University of Architecture and Technology, Changchun, Jilin 130114, China
  • show less

    Dual-frequency laser interferometers are widely used in the field of nanometer measurement. Particular usage context, reducing the errors in a measurement system and improving the measurement accuracy of the system becomes increasingly important. Accordingly, a method is proposed herein to use the vibration modal nodes in the measurement environment to reduce environmental vibrations and improve the measurement accuracy of a dual-frequency laser interferometer. First, the feasibility of the scheme is analyzed from a theoretical perspective, and the experimental measurement system is built based on this theory. Then, the node position in the measurement system is found by using an acceleration sensor. Finally, the measurement repeatability of the dual-frequency laser interferometer in the modal node position and other non-modal node positions are tested. Experimental results show that when there is an external vibration source, the measurement repeatability of the proposed method in the non-modal node position is ±9 nm, and that of the modal node position is ±4 nm. Thus, the measurement accuracy of the dual-frequency laser interferometer in the node position is 125% higher than that in the non-modal node position, which confirms the effectiveness of this method.

    Tools

    Get Citation

    Copy Citation Text

    Haijiao Yu, Guogang Zhao. Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization[J]. Laser & Optoelectronics Progress, 2020, 57(15): 151202

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 11, 2019

    Accepted: Dec. 5, 2019

    Published Online: Aug. 4, 2020

    The Author Email: Zhao Guogang (545937803@qq.com)

    DOI:10.3788/LOP57.151202

    Topics