To fabricate deep and small holes on the difficult-to-cut metals, an electrochemical drilling technology with chip removal and electrolyte replenishment was proposed. It was named electrochemical drilling of deep and small holes with high speed micro electrode. The working mechanism of the technology was analyzed and researched and the influences of some predominant parameters such as rotary speeds, voltages, pulse frequencies, and machining speeds on machining precision and stability were investigated. It points out that high machining precision and stability can be obtained by matching above parameters reasonably under a higher machining efficiency . A groups of deep holes with the diameter less than 0.5 mm and the aspect ratio more than 10 were fabricated successfully on the nickel base super-alloys GH4169 by using the hard alloy micro spiral electrode in a self-developed high-precision micro-electrochemical machining system. These holes show good morphology, lower tapers and clear-cut margins. It is proved that the high-speed electrochemical drilling process for fabricating deep and small holes has a huge potential and broad application prospects.