Metamaterials have artificially structured composite and novel electromagnetic properties not available in natural materials. The electromagnetic response of metamaterials can be tuned flexibly,and this is especially important for the terahertz (THz) technology. The realization and development of THz metamaterials provide an opportunity for the development and application of THz technology. The research progresses on the metamaterials at THz are summarized,including design,preparation,functional devices and other applications.