Chinese Journal of Lasers, Volume. 30, Issue 1, 22(2003)
Experimental Study on Metastable-neon Atom Lithography
The atomic lithography experiments were carried out by use of a metastable neon atomic beam. Metallic meshes were used as masks, and the carbon films produced from the organic molecules of diffusion pump oil, which were adsorbed on the surface of wafers and exposed to the high energy metastable neon atomic beams. The microstructures on the silicon wafers with the resolution of microns were obtained.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Experimental Study on Metastable-neon Atom Lithography[J]. Chinese Journal of Lasers, 2003, 30(1): 22