Chinese Optics Letters, Volume. 11, Issue 2, 022401(2013)

Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides

Keyong Chen, Xue Feng, and Yidong Huang

Surface-plasmon (SP) enhancement of amorphous-silicon-nitride (a-SiNx) light emission with single-layer gold (Au) waveguides is experimentally demonstrated through time-resolved photoluminescence measurement. The a-SiNx active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and the Au waveguide on the top of the a-SiNx layer is fabricated by magnetron sputtering. The maximum Purcell factor value of ~3 is achieved with identified SP resonance of the Au waveguide at ~530 nm.

Tools

Get Citation

Copy Citation Text

Keyong Chen, Xue Feng, Yidong Huang. Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides[J]. Chinese Optics Letters, 2013, 11(2): 022401

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category: Optics at Surfaces

Received: Aug. 29, 2012

Accepted: Sep. 12, 2012

Published Online: Dec. 20, 2012

The Author Email:

DOI:10.3788/col201311.022401

Topics