Laser & Optoelectronics Progress, Volume. 49, Issue 12, 122201(2012)
Surface Profile Measurement of Parallel Plates Based on Low-Coherence Light Interference
The low-coherence light interferometry is used to avoid the spurious fringes when the surface profile of optical parallel plates is tested by laser interferometer. The sodium light, a low coherence light, is used on the Twyman-Green interferometer, therefore the lights reflected from the front and rear surfaces of optical parallel plates will not interfere with the reference light simultaneously. So the spurious fringes are avoided. The captured interferogram is processed with the virtual grating phase-shifting moiré fringe method. The front suface of a parallel plane is measured using Zygo phase-shifting interferometer, whose result coincides with the one obtained by the Twyman-Green interferometer.
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Wang Jun, Chen Lei, Wu Quanying, Zang Taocheng. Surface Profile Measurement of Parallel Plates Based on Low-Coherence Light Interference[J]. Laser & Optoelectronics Progress, 2012, 49(12): 122201
Category: Optical Design and Fabrication
Received: Jun. 5, 2012
Accepted: --
Published Online: Sep. 14, 2012
The Author Email: Jun Wang (wjk31@163.com)