Laser & Optoelectronics Progress, Volume. 57, Issue 9, 091201(2020)
Influence of Reflection-Induced Retardance on the Measurement of Fabry-Perot Etalon Interval
Based on the optical thin film theory, the optical characteristic matrix method was used to derive a mathematical model of the reflection-induced retardance and incident angle of the high-reflection film for air-gap Fabry-Perot (F-P) etalon. The change in the reflection-induced retardance at incident angle ranging 0°-3° was analyzed using TFCalc membrane design software, and the mathematical model was verified. Results show that the reflection-induced retardance and the incident angle exponentially increase, and the reflection-induced retardance is close to 2.88×10 -3 rad when the incident angle is 3°. The experiment setup of the F-P interference imaging optical path, demonstrates that the F-P etalon interval is (2015.50919±0.00002) μm and the relative error limit is approximately 8.6×10 -9. Compared with the measurements that do not consider the reflection phase shift [the interval is (2015.50864±0.00082) μm and the relative error limit is approximately 9×10 -7], the measurement accuracy shows significant improvement.
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Jiayin Yu, Jing Fan, Xuhui Lan, Xiaoyan Shen, Jing Yu. Influence of Reflection-Induced Retardance on the Measurement of Fabry-Perot Etalon Interval[J]. Laser & Optoelectronics Progress, 2020, 57(9): 091201
Category: Instrumentation, Measurement and Metrology
Received: Aug. 14, 2019
Accepted: Sep. 16, 2019
Published Online: May. 6, 2020
The Author Email: Shen Xiaoyan (xyshen@cjlu.edu.cn)