Acta Optica Sinica, Volume. 23, Issue 11, 1359(2003)
Design and Fabrication of Subwavelength Antireflection Gratings
To reduce the polarization sensitivity of antireflection gratings, a particular rectangular structure was analyzed by genexating equivalent medium theory(EMT) to two-dimensional subwavelength structure. An approximate equivalent coefficient for two-dimensional subwavelength was obtained with the related expressions of grating structure. A two-dimensional subwavelength antireflection grating designed for 10. 6 μm was fabricated on a Si substrate by using binary optical processing. The results show that this grating st ructure was similar to a single antireflection film at 10. 6 μm.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and Fabrication of Subwavelength Antireflection Gratings[J]. Acta Optica Sinica, 2003, 23(11): 1359