Acta Optica Sinica, Volume. 9, Issue 10, 871(1989)
Discharge characteristics of XeCl excimer laser with high repetition rate
The discharge characteristics of XeCl excimer laser using UV preionization discharge pump with high repetition rate are described. Influnee of discharge parameters on discharge process are analyzed. The transfer efficiency maxmum hag reached 2.2%.
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Wang Husheng, Ni Jinzhi, Wang Jianye, Li Guangyin, Yu Yinshan. Discharge characteristics of XeCl excimer laser with high repetition rate[J]. Acta Optica Sinica, 1989, 9(10): 871
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