Infrared and Laser Engineering, Volume. 48, Issue 9, 919001(2019)
Research on InP-based HEMT terahertz detector enhanced by bow-tie antenna at room temperature
InP-based HEMT samples were prepared by molecular beam epitaxy(MBE). The sample mobility at room temperature reached 10 289 cm2/(V·s). The terahertz detector coupled with a bow-tie antenna was fabricated by photolithography, etching, magnetron sputtering, spot welding. The bow-tie antenna used in the device was optimized by simulation with HFSS, so that the optimized antenna parameter of S11 was -40 dB, the voltage standing wave ratio(VSWR) was 1.15, gain was 6 dB and impedance matching with the two-dimensional electronic gas(2DEG) channel. The device was measured by VDI′s 0.3 THz Schottky diode terahertz source. The measurement results show that the device noise equivalent power (NEP) is 4 nW/Hz1/2 at room temperature, and the detection response rate is 46 V/W, the device response time is better than 330 μs.
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Li Jinlun, Cui Shaohui, Zhang Jing, Zhang Zhenwei, Zhang Bowen, Ni Haiqiao, Niu Zhichuan. Research on InP-based HEMT terahertz detector enhanced by bow-tie antenna at room temperature[J]. Infrared and Laser Engineering, 2019, 48(9): 919001
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Received: May. 5, 2019
Accepted: Jun. 12, 2019
Published Online: Oct. 12, 2019
The Author Email: Jinlun Li (lijinlun@semi.ac.cn)