Dynamic atomic force microscope (AFM) is able to measure the surface topography of objects by detecting the changes of resonance state of the cantilever. Through the detection on three factors of such resonance state, amplitude, phase and frequency, dynamic AFM could be divided into three kinds of working modes, which are amplitude feedback mode, phase feedback mode and frequency feedback mode, and such feedback modes have different scanning characteristics. Based on the higher-order resonance characteristics of the silicon cantilever, dymamic AFM is able to scan objects when the cantilever is working under the high-order resonance. By combining above working modes, a multi-mode dynamic AFM was developed, which could scan and measure the objects under the above three feedback modes and different order of resonance state. The results of scanning tests under different feedback modes and different order of resonance state by application such system show that the system has sub nanometer resolution in each working mode, in which the system can achieve the optimal sensitivity and resolution under phase feedback mode and when the cantilever runs under the second order resonance, which is 17.5V/μm and 0.29nm respectively. Uuder such optimal sensitivity and resolution, the three dimensional scanning test of grating is conducted to obtain its 3D topography image.