Optoelectronic Technology, Volume. 42, Issue 2, 129(2022)
Study on Developing Process of Large‑size Mask
The Spray development spray mode and Slit development spray mode in the production process of large-size mask were compared and analyzed. Through experiments and production process monitoring, the advantages and disadvantages of the two development spray modes were obtained. Through comprehensive comparison, it was concluded that Slit development spray mode was better in the production process of mask plate.
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Huachao ZHANG, Xiang GE, Qilong XIONG. Study on Developing Process of Large‑size Mask[J]. Optoelectronic Technology, 2022, 42(2): 129
Category: Research and Trial-manufacture
Received: Dec. 28, 2021
Accepted: --
Published Online: Jul. 29, 2022
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