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Optics and Precision Engineering, Volume. 12, Issue z1, 6(2004)

Molecular dynamics simulations of nano-scale interfacial friction in MEMS

[in Chinese]1 and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese]. Molecular dynamics simulations of nano-scale interfacial friction in MEMS[J]. Optics and Precision Engineering, 2004, 12(z1): 6

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    Received: Feb. 22, 2004

    Accepted: --

    Published Online: Nov. 3, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology